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Production of reactive species in capacitively coupled hydrogen plasmas

ORAL

Abstract

Non-equilibrium plasmas that contain hydrogen are of significant interest for basic plasma physics and applications including plasma-enabled materials processing. Obtaining enhanced control of the spatially resolved production of reactive species, including atomic hydrogen, is critical. In this study, we investigate H-atom production in radio-frequency (rf) driven capacitively coupled hydrogen plasmas operating at low pressure. Two-photon absorption laser induced fluorescence measurements are applied to determine the spatially resolved density of atomic hydrogen. These are compared with rf-phase-resolved optical emission spectroscopy and 2D fluid-kinetic simulations to investigate the link between the rf-power deposition and processes that contribute to H-atom production and loss.

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Presenters

  • James P Dedrick

    University of York

Authors

  • James P Dedrick

    University of York

  • Ryan Magee

    University of York, York Plasma Institute, School of Physics, Engineering and Technology, University of York

  • Maximilian Kellermann-Stunt

    University of York,, York Plasma Institute, University of York,

  • Shaun Smith

    Lam Research Corporation

  • Chad Beaudette

    Lam Research Corporation

  • Kari Niemi

    University of York

  • Michael Mo

    University of York

  • Gregory J Smith

    University of Antwerp

  • Andrew R Gibson

    York Plasma Institute, School of Physics, Engineering and Technology, University of York, United Kingdom, University of York, Ruhr University Bochum, York Plasma Institute, School of Physics, Engineering and Technology, University of York

  • Mark J Kushner

    University of Michigan

  • Erik Wagenaars

    University of York

  • Timo Gans

    Dublin City University