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Capacitively Coupled Plasmas I

ORAL · IT2 · ID: 3429985

Presentations

  • Experimental Investigation of Hysteresis Effects in Capacitively Coupled Radio-Frequency Plasmas Operated in CF<sub>4</sub>

    ORAL

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    Presenters

    • Florian Beckfeld

      Ruhr University Bochum, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    Authors

    • Florian Beckfeld

      Ruhr University Bochum, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Maximilian Ryppa

      Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Ihor Korolov

      Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Germany

    • Julian Schulze

      Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    View abstract →

  • Production of reactive species in capacitively coupled hydrogen plasmas

    ORAL

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    Presenters

    • James P Dedrick

      University of York

    Authors

    • James P Dedrick

      University of York

    • Ryan Magee

      University of York, York Plasma Institute, School of Physics, Engineering and Technology, University of York

    • Maximilian Kellermann-Stunt

      University of York,, York Plasma Institute, University of York,

    • Shaun Smith

      Lam Research Corporation

    • Chad Beaudette

      Lam Research Corporation

    • Kari Niemi

      University of York

    • Michael Mo

      University of York

    • Gregory J Smith

      University of Antwerp

    • Andrew R Gibson

      York Plasma Institute, School of Physics, Engineering and Technology, University of York, United Kingdom, University of York, Ruhr University Bochum, York Plasma Institute, School of Physics, Engineering and Technology, University of York

    • Mark J Kushner

      University of Michigan

    • Erik Wagenaars

      University of York

    • Timo Gans

      Dublin City University

    View abstract →

  • 3D Optical Emission Tomography of a Capacitively Coupled Plasma: Technique and Scientific Rational

    ORAL

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    Presenters

    • Hyunseung Lee

      Korean Advanced Institute of Science and Technology (KAIST), KAIST

    Authors

    • Hyunseung Lee

      Korean Advanced Institute of Science and Technology (KAIST), KAIST

    • jiwon CHOI

      Korea Advanced Institute of Science and Technology (KAIST)

    • Jeonghun Ko

      Korea Advanced Institute of Science and Technology (KAIST)

    • Sanghoo Park

      Korea Adv Inst of Sci & Tech, Korea Advanced Institute of Science and Technology (KAIST), Korean Advanced Institute of Science and Technology (KAIST)

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  • Machine Learning for Fast Prediction of Ion Velocity Distribution Functions in Capacitively Coupled Plasmas and for Acceleration of Particle-In-Cell Simulations

    ORAL

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    Publication: A. T. Powis, D. C. Rivera, A. Khrabry, I. D. Kaganovich, "Accelerating multi-time-scale simulations with neural-network generated initial conditions", submitted to the 54th International Conference on Parallel Processing

    Presenters

    • Andrew Tasman Powis

      Princeton Plasma Physics Laboratory, Princeton, USA

    Authors

    • Andrew Tasman Powis

      Princeton Plasma Physics Laboratory, Princeton, USA

    • Domenica Corona

      Princeton Plasma Physics Laboratory

    • Alexander Khrabry

      Lawrence Livermore National Laboratory

    • Alexander V. Khrabrov

      Princeton Plasma Physics Laboratory (PPPL)

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory (PPPL)

    View abstract →