Plasma Polymerization into 3D Structures

Understanding the role of substrate geometry is crucial for optimizing deposition on non-planar substrates. Our study was motivated by special substrate materials requested for tissue engineering, such as porous ceramics or polymer nanofibrous mats. We studied the penetration depth of the plasma enhanced chemical vapor deposition of organic films with amino, anhydride, or carboxyl groups into these microporous materials [1,2]. Besides, we developed a theoretical, analytical description of the deposition into nanofibrous material, the usefulness of which was proved by comparing it with a Monte Carlo simulation [3]. The experimental and theoretical study was extended by investigating the altered transport of film-forming species into different well-defined 3D geometries, such as microtrenches [2], cavities with a slit opening and a cavity with an undercut [4].

[1] M. Michlíček, A. Manakhov, E. Dvořáková, L. Zajíčková, Appl. Surf. Sci. 471 (2019) 835–841

[2] M. Michlíček, L. Blahová, E. Dvořáková, D. Nečas, L. Zajíčková, Appl. Surf. Sci. 540 (2021) 147979

[3] D. Nečas, Physica Scripta 100 (2025) 055601

[4] M. Janůšová, D. Nečas, P. Navascués, D. Hegemann, S. Gavranović, L. Zajíčková, Surf. Coat. Technol. 503 (2025) 131962