Plasma-Surface Interactions II

Presentations

• Multi-scale Simulations of Ion Energy Effects on Amorphous Silicon (a-Si:H) Film Deposition

  ORAL

  Oct. 16, 2025, 11:00 AM – Oct. 16, 2025, 11:15 AM

  Presenters

  • Liuqin Song

    Dalian University of Technology

  Authors

  • Liuqin Song

    Dalian University of Technology

  • Wenzhu Jia

    Southwest University

  • Wan Dong

    Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  • Yi-Fan Zhang

    Dalian University of Technology

  • Yuanhong Song

    School of Physics, Dalian University of Technology, Dalian, China, Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

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• Plasma-electrochemical cell interaction: a novel approach to study plasma-surface chemical interactions

  ORAL

  Oct. 16, 2025, 11:15 AM – Oct. 16, 2025, 11:30 AM

  Presenters

  • Richard van de Sanden

    Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands, DIFFER, Eindhoven, The Netherlands

  Authors

  • Richard van de Sanden

    Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands, DIFFER, Eindhoven, The Netherlands

  • Xingyu Chen

    Dutch Institute of Fundemental Energy Research, Eindhoven, The Netherlands and School of Electrical Engineering, Xi'an Jiaotong University, Xi'an, China

  • Aleksandr Pikalev

    Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands

  • Vasco Guerra

    Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Lisbon University, Instituto Superior Tecnico

  • Michail Tsampas

    Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands

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• Exploring the Impact of Mask Geometries on High Aspect Ratio Silicon Etching Using Cl₂/O₂ Plasmas

  ORAL · Invited

  Oct. 16, 2025, 11:30 AM – Oct. 16, 2025, 12:00 PM

  Presenters

  • Xingyi Shi

    Applied Materials

  Authors

  • Xingyi Shi

    Applied Materials

  • Han Luo

    Applied Materials, Inc.

  • Shahid Rauf

    Applied Materials, Inc.

  • Jason Kenney

    Applied Materials

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• Estimating the O recombination probability in Pyrex from the loss frequency in oxygen-containing plasma

  ORAL

  Oct. 16, 2025, 12:00 PM – Oct. 16, 2025, 12:15 PM

  Publication: Submitted to PSST: Assessing the meaning of the atomic oxygen loss frequency and recombination probability in oxygen glow discharges in Pyrex<br>Planned: Estimating the O recombination probability in Pyrex from the loss frequency in CO2 plasma

  Presenters

  • Pedro Viegas

    Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico - Universidade de Lisboa, Instituto Superior Técnico - Universidade de Lisboa

  Authors

  • Pedro Viegas

    Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico - Universidade de Lisboa, Instituto Superior Técnico - Universidade de Lisboa

  • Tiago C Dias

    University of Michigan

  • Vasco Guerra

    Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Lisbon University, Instituto Superior Tecnico

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• Plasma Polymerization into 3D Structures

  ORAL

  Oct. 16, 2025, 12:15 PM – Oct. 16, 2025, 12:30 PM

  Presenters

  • Lenka Zajickova

    CEITEC, Brno University of Technology

  Authors

  • Lenka Zajickova

    CEITEC, Brno University of Technology

  • David Necas

    CEITEC, Brno University of Technology

  • Martina Janusova

    CEITEC, Brno University of Technology

  • Lucie Janu

    CEITEC, Brno University of Technology

  • Paula Navascués

    Empa, Swiss Federal Laboratories for Materials Science and Tecnology

  • Dirk Hegemann

    Empa, Swiss Federal Laboratory for Materials Science and Technology

  • Nicole Rusnakova

    Faculty of Science, Masaryk University, Brno

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