AI-based plasma density estimation using MAHA sensor
ORAL · Invited
Abstract
We present an AI-powered approach for estimating plasma electron density using a newly developed MAHA (Magnetic-field Harmonic) sensor. The MAHA sensor is designed for in-situ, real-time diagnostics and offers a compact, cost-effective alternative to traditional methods such as optical emission spectroscopy (OES), which often require complex setups and significant investment. By applying data-driven modeling techniques to sensor signals collected under diverse plasma conditions, we demonstrate that AI can enable accurate, non-invasive estimation of plasma parameters. This method underscores the potential of combining intelligent algorithms with next-generation sensor technologies to achieve scalable, automated plasma diagnostics and control.
keywords : Data-driven Plasma Diagnostics, MAHA Sensor, Electron Density Estimation, In-situ Measurement, Smart Monitoring, Virtual Metrology
keywords : Data-driven Plasma Diagnostics, MAHA Sensor, Electron Density Estimation, In-situ Measurement, Smart Monitoring, Virtual Metrology
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Presenters
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Kisuk Sung
RTM
Authors
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Kisuk Sung
RTM
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Heelang Ryu
RTM
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Seungheui Lee
RTM