Photon Momentum-Induced Particle Exhaust in the Low-Pressure Plasmas applicable to semiconductor processing

Photon momentum plays a key role in dust dynamics in astrophysical plasmas, as seen in the formation of comet tails driven by solar radiation pressure. In semiconductor processing systems, nanoscale to microscale particles generated from chamber wall erosion and gas phase nucleation by plasmas become electrostatically trapped near the sheath region above the electrode where semiconductor wafer is placed, forming localized dusty plasmas conditions. In this study, a high-power laser was irradiated onto the trapped particles in the low-pressure plasmas, resulting in particle displacement and exhaust driven by photon momentum. This study presents the experimental demonstration of photon-induced particle transport under semiconductor processing conditions, providing new insights into non-invasive dust control and offering a laboratory analogy to radiation pressure effects observed in space plasmas.