APS Logo

Plasma Architectures & Scaling

FOCUS · DT3 · ID: 3429734

Presentations

  • Energy-resolved angular-distribution measurement of Ar ions impinging on RF electrode in a dual frequency capacitively coupled plasma

    ORAL · Invited

    –

    Publication: K. Ichikawa, et al., Appl. Phys. Express 14 (2021) 126001.<br>S. Kawamura, et al., Plasma Sources Sci. Technol. 34 (2025) 055006.<br>D.H. Kim et al., Jpn. J. Appl. Phys., 64 (2025) 05SP15.

    Presenters

    • Hirotaka Toyoda

      Nagoya University; cLPS, Nagoya University, Nagoya University

    Authors

    • Hirotaka Toyoda

      Nagoya University; cLPS, Nagoya University, Nagoya University

    • Haruka Suzuki

      Nagoya University, Nagoya University; cLPS, Nagoya University

    • DoHan Kim

      Nagoya University

    • Masayoshi Naito

      Nagoya University

    • Kodai Fujitani

      Nagoya University

    View abstract →

  • Nanosecond-pulsed discharge in cryogenic liquids

    ORAL · Invited

    –

    Publication: Dobrynin D, Rakhmanov R and Fridman A 2019 Nanosecond-pulsed discharge in liquid nitrogen: optical characterization and production of an energetic non-molecular form of nitrogen-rich material J. Phys. D: Appl. Phys. 52 39LT01<br>Dobrynin D, Song Z and Fridman A 2014 Optical characterization of nanosecond-pulsed discharge in liquid nitrogen J. Phys. D: Appl. Phys. 47 252003<br>Danil Dobrynin and Alexander Fridman 2024 J. Phys. D: Appl. Phys. 57 445204<br>

    Presenters

    • Danil v Dobrynin

      Drexel University

    Authors

    • Danil v Dobrynin

      Drexel University

    • Zhiheng Song

      Drexel university

    • Alexander Fridman

      Drexel University

    View abstract →

  • Similarity Theory and Scaling Networks for Vacuum and Gaseous Electronics Devices

    ORAL

    –

    Publication: [1] Y. Fu*, B. Zheng, D.-Q. Wen, P. Zhang, Q. H. Fan, and J. P. Verboncoeur, "Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas", Appl. Phys. Lett. 117, 204101 (2020).<br>[2] Y. Fu*, B. Zheng, D.-Q. Wen, P. Zhang, Q. H. Fan, and J. P. Verboncoeur, High-energy ballistic electrons in low pressure radio-frequency plasmas, Plasma Sources Sci. Technol. 29, 09LT01 (2020).<br>[3] Y. Fu*, H. Wang, B. Zheng, P. Zhang, Q. H. Fan, X. Wang, and J. P. Verboncoeur, "Generalizing similarity theory for radio frequency discharge plasmas across nonlinear transition regimes", Phys. Rev. Appl. 16, 054016 (2021).<br>[4] Y. Fu*, H. Wang, and X. Wang, "Similarity theory and scaling laws for low-temperature plasma discharges: a comprehensive review," Rev. Mod. Plasma Phys. 7, 10 (2023).<br>[5] J. Chen, C. Lin, H. Wang, L. K. Ang, and Y. Fu*, "Ultrafast oscillation in a field emission-driven miniaturized gaseous diode", Plasma Sources Sci. Technol. 33, 045001 (2024).<br>[6] D. Yang, J. P. Verboncoeur, and Y. Fu*, "Demonstration of similarity laws and scaling networks for radio-frequency plasmas", Phys. Rev. Lett. 134, 045301 (2025).

    Presenters

    • Yangyang Fu

      Tsinghua University

    Authors

    • Yangyang Fu

      Tsinghua University

    View abstract →

  • Kinetic Modeling of Breakdown Phenomena in Narrow Gaps for Advanced Plasma Processing

    ORAL

    –

    Publication: [1] S.H. Son, G. Go, W. Villafana, I.D. Kaganovich, A. Khrabrov, H.-C. Lee, K.-J. Chung, G.-S. Chae, S. Shim, D. Na, and J.Y. Kim, "Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry," Applied Physics Letters 123(23), 232108 (2023).

    Presenters

    • Willca Villafana

      Princeton Plasma Physics Laboratory (PPPL)

    Authors

    • Willca Villafana

      Princeton Plasma Physics Laboratory (PPPL)

    • Sunghyun Son

      Princeton Plasma Physics Laboratory (PPPL)

    • Alexander V. Khrabrov

      Princeton Plasma Physics Laboratory (PPPL)

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory (PPPL)

    • Dmytro Sydorenko

      Department of Physics, University of Alberta, AB, Canada

    View abstract →

  • Azimuthal and axial structures in 3D Particle-in-Cell simulations of Penning discharge

    ORAL

    –

    Publication: Submitted to PSST

    Presenters

    • Mina Papahn Zadeh

      University of Saskatchewan

    Authors

    • Mina Papahn Zadeh

      University of Saskatchewan

    • Alexandre Likhanskii

      Applied Materials, Inc.

    • Andrei Smolyakov

      Univ Saskatchewan

    • Mikhail Tyushev

      University of Saskatchewan

    • Nirbhav S Chopra

      Princeton Plasma Physics Laboratory (PPPL)

    • Ivan Romadanov

      Princeton Plasma Physics Laboratory (PPPL)

    • Yevgeny Raitses

      Princeton Plasma Physics Laboratory (PPPL)

    View abstract →