A novel approach for calculating the plasma resonance behavior excited by wall-integrated planar diagnostic probes with arbitrary geometry

Michael Friedrichs; Peng Liang; Chun Jie Wang; Ralf Peter Brinkmann; Jens Oberrath

A novel approach for calculating the plasma resonance behavior excited by wall-integrated planar diagnostic probes with arbitrary geometry

ORAL

Abstract

Active Plasma Resonance Spectroscopy (APRS) is a diagnostic technology that makes use of the natural ability of plasmas to resonate on or near the plasma frequency. Different from the passive plasma resonance spectroscopy, which observes the excitation already existing in the plasma, APRS could obtain important plasma parameters such as electron density or temperature by establishing reliable mathematical relations to the recorded spectral response from the dynamic interaction between plasma and the radio frequent signal (usually in the GHz range) by the probe. Among all the types of probe designs, wall-integrated planar diagnostic probes provide the optimal condition for monitoring plasmas by introducing the minimum undesired disturbance. In this work, a novel approach is presented which allows to determine the dynamic interaction by separating the calculation of the dissipated energy inside the wall-integrated planar diagnostic probe with an arbitrary geometry from the rest part of the computation regions, where the cold plasma model is applied. The advantage of this approach is shown for different available designs and can be utilized by more sophisticated plasma models and even more complicated probe configurations.

Oct. 7, 2022, 12:30 AM – Oct. 7, 2022, 12:45 AM

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Presenters

Peng Liang

South Westphalia University of Applied Science Soest

Authors

Michael Friedrichs

South Westphalia University of Applied Science Soest
Peng Liang

South Westphalia University of Applied Science Soest
Chun Jie Wang

Ruhr-University of Bochum
Ralf Peter Brinkmann

Ruhr-University of Bochum, Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
Jens Oberrath

South Westphalia University of Applied Science