Probe Diagnostics

Probe Diagnostics

FOCUS · IF3 · ID: 546620

Presentations

A novel approach for calculating the plasma resonance behavior excited by wall-integrated planar diagnostic probes with arbitrary geometry

ORAL

Oct. 7, 2022, 12:30 AM – Oct. 7, 2022, 12:45 AM

Publication: [1] The multipole resonance probe: characterization of a prototype ,M. Lapke et al., Plasma Sources Sci. Technol. 20, 042001 (2011). [2] Plasma Resonance in a Radio-Frequency Probe,K. Takayama, H. Ikegami, und S. Miyazaki, Phys. Rev. Let. 5, 238 (1960). [3] High-Frequency Dielectric Resonance Probe for the Measurement of Plasma Densities,A. M. Messiaen and P. E. Vandenplas, J. Appl. Phys. 37, 1718 (1966) [4] RF Admittance Measurements of a Slotted-Sphere Antenna Immersed in a Plasma,J. A. Waletzko and G. Bekefi, Radio Sci. 2, 489 (1967). [5] The impedance of a dipole antenna in the ionosphere: 1. Experimental study,N. Vernet, R. Manning, and J. L. Steinberg, Radio Sci. 10, 517 (1975). [6] Measurement of absolute electron density with a plasma impedance probe ,D. D. Blackwell, D. N. Walker, and W. E. Amatucci, Rev. Sci. Instrum 76, 023503 (2005). [7] Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas,H. Kokura, K. Nakamura, I.P. Ghanashev, and H. Sugai, Japan. J. Appl. Phys 38, 5262 (1999). [8] Practical implementation of a two-hemisphere plasma absorption probe ,C. Scharwitz, M. Böke, J. Winter, M. Lapke, T. Mussenbrock, and R. P. Brinkmann, Appl. Phys. Lett. 94, 011502 (2009). [9] The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas ,M. Lapke, T. Mussenbrock, and R. P. Brinkmann, Appl. Phys. Lett. 93, 051502 (2008). [10] Interaction of an antenna with a hot plasma and the theory of resonance probes ,J. A. Fejer, Radio Sci. 68D, 1171 (1964) [11] THE BEHAVIOR OF THE RESONANCE PROBE IN A PLASMA ,R. S. Harp, Appl. Phys. Lett. 4, 186 (1964) [12] Characteristics of the Plasma Resonance Probe ,R. S. Harp and F. W. Crawford, J. Appl. Phys. 35, 3436 (1964) [13] Characteristics of Resonance Probes ,T. Dote and T. Ichimiya, J. Appl. Phys. 36, 1866 (1965). [14] An Investigation of Boundary Theories for the Resonance Probe ,R. J. Kostelnicek, Radio Sci. 3, 319 (1968). [15] Linear and Nonlinear Response of a Plasma Sheath to Radio Frequency Potentials ,A. J. Cohen and G. Bekefi, Phys. Fluids 14, 1512 (1971). [16] The impedance characteristic of a spherical probe in an isotropic plasma ,J. Tarstrup and W. J. Heikkila, Radio Sci. 4, 493 (1972). [17] Impedance of an ion-sheathed spherical probe in a warm, isotropic plasma ,T. Aso, Radio Sci. 8, 139 (1973). [18] Radio-Frequency Probes in a Nonlinear Isotropic Plasma ,C. C. Bantin and K. G. Balmain, Can. J. Phys. 52, 291 (1974). [19] A novel technique for plasma density measurement using surface-wave transmission spectra ,S. Dine, J.P. Booth, G.A Curley, C.S. Corr, J. Jolly, and J. Guillon, Plasma Scources Sci. Technol. 14, 777 (2005). [20] On collisionless energy absorption in plasmas: Theory and experiment in spherical geometry ,D. N. Walker, R. F. Fernsler, D. D. Blackwell, W. E. Amatucci, and S. J. Messer, Phys. Plasmas 13, 032108 (2006). [21] Modeling and simulation of the plasma absorption probe ,M. Lapke, T. Mussenbrock, R. P. Brinkmann, C. Scharwitz, M. Böke, and J. Winter, Appl. Phys. Lett. 90, 121502 (2007). [22] Simulation of resistive microwave resonator probe for high-pressure plasma diagnostics ,J. Xu, K. Nakamura, Q. Zhang, and H. Sugai, Plasma Sources Sci. Technol. 18 045009, (2009). [23] Advanced high-pressure plasma diagnostics with hairpin resonator probe surrounded by film and sheath ,J. Xu, J. Shi, J. Zhang, Q. Zhang, K. Nakamura, and H. Sugai, Chinese Phys. B 19 075206, (2010). [24] Experimental and Simulational Studies on the Theoretical Model of the Plasma Absorption Probe ,B. Li, H. Li, Z. Chen, J. Xie G. Feng, and W. Liu, Plasma Sci. Technol. 12, 513 (2010). [25] Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas ,I. Linag, K. Nakamura, and H. Sugai, Appl. Phys. Express 4, 066101 (2011) [26] Active plasma resonance spectroscopy: a functional analytic description ,M. Lapke, J. Ober- 15 rath, T. Mussenbrock und R. P. Brinkmann, Plasma Scources Sci. Technol. 22, 025005 (2013). [27] Active plasma resonance spectroscopy: eigenfunction solutions in spherical geometry ,J. Oberrath and R. P. Brinkmann, Plasma Sources Sci. Technol. 23, 065025 (2014) [28] The Multipole Resonance Probe: Progression and Evaluation of a Process Compatible Plasma Sensor ,C. Schulz and I. Rolfes, IEEE Sensors Journal 14 Issue: 10,Sensors Applications Symposium (SAS), IEEE (2014) [29] M. Friedrichs and J. Oberrath,"The planar multipole resonance probe: a functional analytic approach," EPJ Techn Instrum, vol. 5, Aug. 2018. [30] M. Friedrichs, D. Pohle, I. Rolfes and J. Oberrath, "Planar Multipole Resonance Probe: Comparison of Full-wave Electromagnetic Simulation and Electrostatic Approximation," 2019 Kleinheubach Conference, 2019, pp. 1-3. [31] C.Wang, M. Friedrichs, J.Oberrath and R.P. Brinkmann 2021 Plasma Sources Sci. Technol. 30 105011 [32] The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor, C. Schulz, T. Styrnoll, P. Awakowicz and I. Rolfes, IEEE Transactions on Instrumentation and Measurement 64, 14981187 (2015) [33] Flat cutoff probe for real-time electron density measurement in industrial plasma processing, H J Yeom et al 2020 Plasma Sources Sci. Technol. 29 035016
Presenters
- Peng Liang
 
 South Westphalia University of Applied Science Soest
Authors
- Michael Friedrichs
 
 South Westphalia University of Applied Science Soest
- Peng Liang
 
 South Westphalia University of Applied Science Soest
- Chun Jie Wang
 
 Ruhr-University of Bochum
- Ralf Peter Brinkmann
 
 Ruhr-University of Bochum, Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
- Jens Oberrath
 
 South Westphalia University of Applied Science
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Second harmonic currents in rf-biased, inductively coupled plasmas

ORAL

Oct. 7, 2022, 12:45 AM – Oct. 7, 2022, 1:00 AM
Presenters
- Mark Sobolewski
  
  National Institute of Standards and Technology
Authors
- Mark Sobolewski
  
  National Institute of Standards and Technology
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The performance of the pulse bias hairpin resonator probe for negative ion diagnostic

ORAL

Oct. 7, 2022, 1:00 AM – Oct. 7, 2022, 1:15 AM

Publication: [1] Sirse, N., Karkari, S.K. and Turner, M.M., 2015. Probing negative ion density and temperature using a resonance hairpin probe. Plasma Sources Science and Technology, 24(2), p.022001. [2] Singh, P. and Karkari, S.K., 2022. Equilibrium properties of inhomogeneous partially-magnetized plasma containing negative ions. Journal of Physics D: Applied Physics, 55(23), p.235201.
Presenters
- Pawandeep Singh
 
 Institute for Plasma Research
Authors
- Pawandeep Singh
 
 Institute for Plasma Research
- Swati Swati
 
 Institute for Plasma Research
- Jay K Joshi
 
 Albot Technologies Pvt. Ltd, Pune, Maharashtra 411044, India
- Nageswara R Epuru
 
 Institute for Plasma Research
- Yashshri Patil
 
 Institute for Plasma Research
- Shantanu Karkari
 
 Institute for Plasma Research
View abstract →
Power law parametrization of the ion collecting area for a planar Langmuir probe diagnostic

ORAL · Invited

Oct. 7, 2022, 1:15 AM – Oct. 7, 2022, 1:45 AM

Publication: Y. Lim et al, Plasma Sources Sci. Technol. 31 (2022) 024001, "Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas"
Presenters
- Yegeon Lim
  
  KAIST
Authors
- Yegeon Lim
  
  KAIST
- Gregory Severn
  
  University of San Diego
- Chi-Shung Yip
  
  Chinese Academy of Sciences
- Young-chul Ghim
  
  KAIST, Department of Nuclear and Quantum Engineering, KAIST, Daejeon, 34141, S. Korea
View abstract →
Analysis of temperature dependency of the resonant frequency for electron density measurement with curling probe

ORAL

Oct. 7, 2022, 1:45 AM – Oct. 7, 2022, 2:00 AM
Presenters
- Daisuke Ogawa
  
  Chubu University
Authors
- Daisuke Ogawa
  
  Chubu University
- Keiji Nakamura
  
  Chubu University
- Hideo Sugai
  
  Chubu University
View abstract →
Langmuir probe and Laser Photodetachment Study of Afterglow Phase in Dual RF Frequency Pulsed Plasma Etching Processes Operated with Synchronized DC Bias

ORAL

Oct. 7, 2022, 2:00 AM – Oct. 7, 2022, 2:15 AM
Presenters
- Makoto Sekine
  
  Nagoya University, Nagoya Univ
Authors
- Makoto Sekine
  
  Nagoya University, Nagoya Univ
- Bibhuti B Sahu
  
  Department of Energy Science and Engineering, IIT Delhi
- Shogo Hattori
  
  Nagoya University
- Takayoshi Tsutsumi
  
  Nagoya University, Nagoya Univ
- Nikolay Britun
  
  Nagoya University, Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan.
- Kenji Ishikawa
  
  Nagoya Univ, Nagoya University, Nagoya University, Japan
- Hirohiko Tanaka
  
  Nagoya University
- Taku Gohira
  
  Tokyo Electron Miyagi
- Noriyasu Ohno
  
  Nagoya University, Hiroshima University
- Masaru Hori
  
  Nagoya Univ
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