Single Crystal Diamond Growth by High-Flow Ar/CH₄/H₂ Modulated Induction Meso-Plasmas at Reduced Pressures

Single crystal diamond growth experiment was conducted using the power-modulated induction meso-plasma at reduced pressure condition. The induction meso-plasma was realized by improving the apparatus to achieve both reduced pressure and larger gas flow simultaneously. The influence of the flow rate of the source gas was investigated on diamond growth by exposure of the modulated induction meso-plasma. In addition, numerical thermofluid simulation was carried out for the modulated induction plasma at reduced pressures at different gas flow rates.