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Diamond Like Carbon Deposition

ORAL · GR5 · ID: 549846

Presentations

  • Effect of pulse width on deposition of diamond-like carbon on high power pulsed magnetron sputtering

    ORAL

    –

    Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

    Presenters

    • Takayuki Ohta

      Meijo Univ, Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Department of Electrical and Electronic Engineering, Meijo University, Japan, Department of Electrical and Electronic Engineering, Meijo University, Japan., Meijo university, Meijo University, Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

    Authors

    • Takayuki Ohta

      Meijo Univ, Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Department of Electrical and Electronic Engineering, Meijo University, Japan, Department of Electrical and Electronic Engineering, Meijo University, Japan., Meijo university, Meijo University, Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

    • Jo Matsushima

      Meijo university

    • Sota Okumura

      Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Meijo university

    • Akinori Oda

      Chiba Inst of Tech, Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan., Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan, Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan., Chiba Institute of Technology

    • Hiroyuki Kousaka

      Gifu University, Yanagido 1-1, Gifu 501-1193, Japan., Department of Mechanical Engineering, Gifu University, Japan, Department of Mechanical Engineering, Gifu University, Japan., Gifu University

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  • Gas phase diagnostics on high power pulsed magnetron sputtering using double-pulse target-voltage

    ORAL

    –

    Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

    Presenters

    • Hiro Kunieda

      Department of Electrical and Electronic Engineering, Meijo University, Japan.

    Authors

    • Hiro Kunieda

      Department of Electrical and Electronic Engineering, Meijo University, Japan.

    • Akinori Oda

      Chiba Inst of Tech, Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan., Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan, Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan., Chiba Institute of Technology

    • Hiroyuki Kousaka

      Gifu University, Yanagido 1-1, Gifu 501-1193, Japan., Department of Mechanical Engineering, Gifu University, Japan, Department of Mechanical Engineering, Gifu University, Japan., Gifu University

    • Takayuki Ohta

      Meijo Univ, Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Department of Electrical and Electronic Engineering, Meijo University, Japan, Department of Electrical and Electronic Engineering, Meijo University, Japan., Meijo university, Meijo University, Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

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  • Effect of xenon gas on deposition of diamond-like carbon film using high power pulsed magnetron sputtering

    ORAL

    –

    Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

    Presenters

    • Keita Takeda

      Department of Electrical and Electronic Engineering, Meijo University, Japan

    Authors

    • Keita Takeda

      Department of Electrical and Electronic Engineering, Meijo University, Japan

    • Akinori Oda

      Chiba Inst of Tech, Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan., Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan, Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan., Chiba Institute of Technology

    • Hiroyuki Kousaka

      Gifu University, Yanagido 1-1, Gifu 501-1193, Japan., Department of Mechanical Engineering, Gifu University, Japan, Department of Mechanical Engineering, Gifu University, Japan., Gifu University

    • Takayuki Ohta

      Meijo Univ, Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Department of Electrical and Electronic Engineering, Meijo University, Japan, Department of Electrical and Electronic Engineering, Meijo University, Japan., Meijo university, Meijo University, Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

    View abstract →

  • Deposition of hydrogenated diamond-like carbon using high power impulse magnetron sputtering

    ORAL

    –

    Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

    Presenters

    • Sota Okumura

      Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Meijo university

    Authors

    • Sota Okumura

      Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Meijo university

    • Akinori Oda

      Chiba Inst of Tech, Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan., Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan, Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan., Chiba Institute of Technology

    • Hiroyuki Kousaka

      Gifu University, Yanagido 1-1, Gifu 501-1193, Japan., Department of Mechanical Engineering, Gifu University, Japan, Department of Mechanical Engineering, Gifu University, Japan., Gifu University

    • Takayuki Ohta

      Meijo Univ, Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Department of Electrical and Electronic Engineering, Meijo University, Japan, Department of Electrical and Electronic Engineering, Meijo University, Japan., Meijo university, Meijo University, Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

    View abstract →

  • Optimization of hexagonal boron nitride deposition by micro hollow cathode discharge

    ORAL

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    Publication: A. Remigy et al. " Cross-comparison of diagnostic and 0D modeling of a micro-hollow cathode discharge in the stationary regime in an Ar/N2 gas mixture". J. Phys. D: Appl. Phys. 55 (2022) 105202<br>H. Kabbara et al. "A microplasma process for hexagonal boron nitride thin film synthesis". Appl. Phys. Lett. 116 (2020) 171902

    Presenters

    • Claudia Lazzaroni

      LSPM CNRS UPR3407

    Authors

    • Claudia Lazzaroni

      LSPM CNRS UPR3407

    • Alice Remigy

      LSPM CNRS UPR3407

    • Manoel Jacquemin

      LSPM CNRS UPR3407

    • Vianney Mille

      LSPM CNRS UPR3407

    • Ovidiu Brinza

      LSPM CNRS UPR3407

    • Xavier Aubert

      LSPM CNRS UPR3407

    • Swaminathan Prasanna

      LSPM CNRS UPR3407

    • Kristaq Gazeli

      LSPM CNRS UPR3407

    • Guillaume Lombardi

      LSPM CNRS UPR3407

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  • Evaluation of carbon bonding of DLC films using HF-HiPIMS method by Raman spectroscopy

    ORAL

    –

    Publication: S. Takabayashi, K. Okamoto, Y. Takakuwa and T. Nakatani, Surf. Coat. Technol. 330, 26 (2017).

    Presenters

    • Hiroyuki Fukue

      Okayama University of Science

    Authors

    • Hiroyuki Fukue

      Okayama University of Science

    • Tatsuyuki Nakatani

      Okayama University of Science

    • Tadayuki Okano

      Tokyo Electronics Co., Ltd.

    • Masahide Kuroiwa

      Tokyo Electronics Co., Ltd.

    • Shinsuke Kunitsugu

      Industrial Technology Center of Okayama Prefecture

    • Hiroki Oota

      Kenix Corporation

    • Hiroki Oota

      Kenix Corporation

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  • Deposition mechanism of hydrogenated amorphous carbon film by C<sub>3</sub>H<sub>6</sub>/H<sub>2</sub> mixture gas plasma

    ORAL

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    Presenters

    • Hiroki Kondo

      Nagoya Univ, Nagoya University, Japan

    Authors

    • Hiroki Kondo

      Nagoya Univ, Nagoya University, Japan

    • Jumpei Kurokawa

      Nagoya University

    • Takayoshi Tsutsumi

      Nagoya University, Nagoya Univ

    • Makoto Sekine

      Nagoya University, Nagoya Univ

    • Kenji Ishikawa

      Nagoya Univ, Nagoya University, Nagoya University, Japan

    • Masaru Hori

      Nagoya Univ, Nagoya University, Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan.

    View abstract →