On the high frequency floating harmonic method in inductively coupled plasmas

In the conventional floating harmonic method, the sinusoidal voltage of which frequency is kHz were applied to the probe sheath. In this work, the floating harmonic method using sinusoidal waveform at 1 MHz is proposed to measure plasma parameters such as the plasma density and electron temperature with high-time resolution. In the high frequency (1 MHz) floating harmonic method, we applied a Child-Langmuir sheath model to consider a capacitance of the probe sheath. The plasma parameters obtained from the high frequency floating harmonic method are in good agreement with measurements from the electron energy distribution function.