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Poster Session IV (4:30pm - 6:30pm)

POSTER · RW2





Presentations

  • Examining the Effects of Changing Plasma Parameters on Peroxide Production in the Effluent and Liquid Phase Using a Cost Reference Jet

    POSTER

    Authors

    • Brayden Myers

      North Carolina State University

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • Computational and experimental studies of plasma stratification in noble gases and nitrogen

    POSTER

    Authors

    • Vladimir Kolobov

      University of Alabama in Huntsville

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • Experimental studies of electronegative plasma in a DC-discharge device (EPaX) designed to study internal sheaths and boundary sheath formation

    POSTER

    Authors

    • Lena Belvin

      Dept. of Physics \& Biophysics, University of San Diego

    • Peixuan Li

      Dept. of Engineering-Physics, University of Wisconsin-Madison

    • Noah Hershkowitz

      Dept. of Engineering-Physics, University of Wisconsin-Madison, Dept. of Engineering-Physics, Univerisity of Wisconsin - Madison

    • Greg Severn

      Dept. of Engineering-Physics, University of Wisconsin-Madison, Dept. of Physics \& Biophysics, University of San Diego, Dept. of Physics & Biophysics, University of San Diego, Dept. of Physics \& Biophysics, Univ. of San Diego, University of San Diego

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  • Deconvolving Kr II laser-induced fluoresence signals for a test of Bohm's Criterion near negatively biased grid in a single ion species Kr plasma

    POSTER

    Authors

    • Cooper Kent

      Dept. of Physics \& Biophysics, University of San Diego

    • Peixuan Li

      Dept. of Engineering-Physics, University of Wisconsin-Madison

    • Noah Hershkowitz

      Dept. of Engineering-Physics, University of Wisconsin-Madison, Dept. of Engineering-Physics, Univerisity of Wisconsin - Madison

    • Greg Severn

      Dept. of Engineering-Physics, University of Wisconsin-Madison, Dept. of Physics \& Biophysics, University of San Diego, Dept. of Physics & Biophysics, University of San Diego, Dept. of Physics \& Biophysics, Univ. of San Diego, University of San Diego

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  • Towards electric field measurements in liquid water~by electro-optic Kerr effect

    POSTER

    Authors

    • Tomas Hoder

      Masaryk University, Czechia

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • Particle-in-Cell Simulations of the Alpha and Gamma Modes in Collisional Nitrogen Capacitive Discharges

    POSTER

    Authors

    • Emi Kawamura

      University of California, Berkeley

    • Michael Lieberman

      University of California, Berkeley

    • Allan Lichtenberg

      University of California, Berkeley

    • Pascal Chabert

      CNRS Ecole Polytechnique, Laboratoire de Physique des Plasmas, CNRS, Ecole Polytechnique, France, Ecole Polytechnique, France, Laboratoire de Physique des Plasmas (LPP), Laboratoire de Physique des Plasmas, LPP, CNRS Ecole Polytechnique, Laboratoire de Physique des Plasmas, Ecole Polytechnique

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  • One Dimensional Model of a Planar Dielectric Barrier Discharge in Air

    POSTER

    Authors

    • Bahram Mahdavipour

      Institute of Product and Process Innovation, Leuphana University Lueneburg, Germany

    • Sebastian Dahle

      Department of Wood Science and Technology, Biotechnical Faculty, University of Ljubljana, Jamnikarjeva 101, 1000 Ljubljana, Slovenia

    • Jens Oberrath

      South Westphalia University of Applied Science, Department of Electric Power Engineering, Modeling and Simulation, Soest, Germany, South Westphalia University of Applied Sciences

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  • Comparison of lumped element model and particle in cell simulation for radio frequency magnetron discharges

    POSTER

    Authors

    • Dennis Engel

      Ruhr University Bochum

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    View abstract →

  • Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

    POSTER

    Authors

    • Li Wang

      Ruhr-University Bochum, Germany, Ruhr-University Bochum

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    View abstract →

  • The role of electron-induced secondary electrons in low-pressure capacitively coupled oxygen plasmas

    POSTER

    Authors

    • Benedek Horvath

      Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics; West Virginia University, Ruhr-University Bochum, Dalian University of Technology

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • About the Poisson-Boltzmann equation for magnetized technological plasmas

    POSTER

    Authors

    • Kevin Koehn

      Ruhr University Bochum

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • The pulsed mode of negative DC corona discharge in nitrogen and oxygen mixture gas

    POSTER

    Authors

    • Xing Zhang

      State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi’an Jiaotong University

    • Yulin Guo

      State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi’an Jiaotong University

    • Anbang Sun

      State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi’an Jiaotong University

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  • Flexible Plasma Jet Source for Biomedical Applications

    POSTER

    Authors

    • Carles Corbella Roca

      George Washington University

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    View abstract →

  • Electron dynamics in micro atmospheric pressure radio frequency plasma jets with customized electrode materials and topologies

    POSTER

    Authors

    • Lena Bischoff

      Ruhr-University Bochum, Germany

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • Fast optical and electrical measurements at a single microdischarge setup during plasma electrolytic oxidation (PEO)

    POSTER

    Authors

    • Anna Lena Schoene

      Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Vera Bracht

      Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Patrick Hermanns

      Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Peter Awakowicz

      Ruhr University Bochum, Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

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  • Development of an Ozone-based Treatment System for Reuse of Personal Protective Equipment (PPE)

    POSTER

    Authors

    • John Lassalle

      Texas A&M University Department of Mechanical Engineering

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • Effect of Helium Mixing on Temperature distribution of Krypton Laser Sustained Plasma

    POSTER

    Authors

    • Kazuyoshi Ishikawa

      Department of Engineering, Shizuoka University

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • Ultrasonic Assisted Fabrication of Metal Nanoparticles by Laser Ablation in Liquid

    POSTER

    Authors

    • Xin Hu

      Nagoya University

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    View abstract →

  • Similarity of Radio-Frequency Discharges in Nonlocal Regimes.

    POSTER

    Authors

    • Yangyang Fu

      Michigan State Univ, Michigan State University

    • Bocong Zheng

      Michigan State University

    • Peng Zhang

      ECE, Michigan State University, 48824, USA, Michigan State University, ECE, Michigan State University

    • Qi Hua Fan

      Michigan State University

    • John P. Verboncoeur

      Michigan State University

    • Xinxin Wang

      Tsinghua University

    View abstract →

  • Electron heating dynamics in magnetically-enhanced Capacitively Coupled Plasmas

    POSTER

    Authors

    • Birk Berger

      Ruhr Univ Bochum

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • RF multi-jet, atmospheric plasma for metal substrate cleaning

    POSTER

    Authors

    • Cezar Gaman

      Dublin City University

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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  • Breakdown process of dual-frequency Capacitively Coupled Plasma: A collective simulation

    POSTER

    Authors

    • Hao Wu

      Huazhong Univ

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

    • Clarisse Bourdelle

      Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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