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Breakdown process of dual-frequency Capacitively Coupled Plasma: A collective simulation

POSTER

Abstract

Study on breakdown can not only reveal the evolution of electrical feature of plasma, but also verify the theory of gas discharge. Almost all plasma sources have to undergo breakdown process, however, due to the extremely short time interval, it is difficult for experiment to observe this evolution process. One-dimensional direct implicit Particle-In-Cell/Monte-Carlo Collision (PIC/MCC) program is used to study the breakdown process of Capacitively Coupled Plasma (CCP) driven by dual-frequency and coupled with external circuit. The result shows that the breakdown process can be divided into the pre-breakdown and post-breakdown process clearly, and it can be distinguished by the formation of sheath. In the pre-breakdown stage, plasma density grows exponentially, however, because of low initial density, electric field can penetrate the whole discharge area without any blocking, which produce plenty of high-energy electrons, and many of them can bombard the electrode plate to generate secondary electrons. There is a interim phase between the pre-breakdown and post-breakdown, during which both the electron generation rate and heating power of plasma reach the maximum value and the external circuit changes from a linear system to nonlinear system. In post-breakdown stage, the density and temperature of plasma gradually stabilize. CCP device can be approximated as a series of nonlinear capacitance, resistance and "inductance", and capacitance dominates the characteristics of CCP and the changing capacitance is the main cause of harmonics.

Authors

  • Hao Wu

    Huazhong Univ

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France