Microwave Interferometric Density Measurements of a Pulsed Helicon Source

The intense rf environment of a helicon plasma source is problematic for electrostatic probe measurements of plasma density, particularly at low neutral pressures. Here we present measurements of the line-integrated plasma density in a helicon plasma source using a multi-frequency (20-40 GHz) microwave interferometer. The design of the diagnostic and the data acquisition system are presented, as well as a comparison to density profiles obtained with a moveable electrostatic probe. A parametric fit to the probe profile measurements is used to determine the peak density from the microwave density measurements.