High Aspect Ratio Carbon Nanotube MEMS

ORAL

Abstract

A new approach to the fabrication of microelectronic mechanical devices (MEMS) is a bottom-up design using carbon nanotubes (CNTs). A substrate, typically silicon, is prepared for MEMS construction by first depositing a sacrificial layer of SiO$_{2}$ for release. Then a 30nm layer of Al$_{2}$O$_{3}$ is deposited as a diffusion barrier for the CNT catalyst material (Fe). Next, using photolithography, resist is patterned and developed. A thin layer (4nm) of Fe is deposited on top of the resist and in the trenches where the resist was removed during development. Finally, ``lift-off,'' or removal of the remaining resist, leaves the surface with Fe patterned where CNTs are to be grown. CNTs are grown to various heights, providing high aspect ratios and well-defined features. The CNT ``forests'' can then be filled with various materials, of which we have tested and operated silicon and silicon nitride devices. To release MEMS devices for operation, the substrate is immersed in HF, removing part of the SiO$_{2}$ layer below. The new composite's properties were analyzed and compared to MEMS devices fabricated using conventional methods.

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Authors

  • Nick Morrill

    Brigham Young University

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering