Fabrication and Analysis of Vertically Aligned and Patterned Silicon-Carbon Core Shell Nanotubes

Silicon-carbon core shell nanotubes(SiCNTs) are synthesized on a vertically aligned and patterned carbon nanotube template. Vertical-aligned carbon nanotube(CNT) forests are grown from a patterned catalyst seed layer by standard thermal chemical vapor deposition (CVD) methods. Thin silicon films are deposited on the CNTs by low pressure chemical vapor deposition(LPCVD). Some features of these SiCNTs are controllable, such as the diameter, length, crystallization, and pattern, by varying details in the fabrication.