EUV Spectrometers for Source Development, Characterization and Optimization

We report on the development of EUV transmission grating spectrometers. These compact instruments cover an extremely wide spectral range, from 2 to 250 nm, with 0.2 nm resolution and can be absolutely calibrated. They are ideal for characterizing spectral emission from EUV sources. The wide spectral range allows simultaneous measurements of both in-band and out-of-band emission. Spectral measurements from LPP sources on Li and Sn will be presented.