Extreme Ultraviolet Polarimetry with Laser-Generated High-Order Harmonics

ORAL

Abstract

We describe an extreme-ultraviolet (EUV) polarimeter that employs laser-generated high-order harmonics as the light source. The polarimeter is designed to characterize materials and thin films for use with EUV light. Laser high harmonics are highly directional with easily rotatable linear polarization, not typically available with other EUV sources. The harmonics have good wavelength coverage, potentially spanning the entire EUV from a few to a hundred nanometers. We have found that the polarimeter reflectance data agrees well with data obtained at the Advanced Light Source Synchrotron (Beamline 6.3.2) and with calculated data. We also describe a new measurement technique in which the ratio of p- to s-polarized reflectance is used to extract optical properties of samples, rather than the absolute reflectance.

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Authors

  • Nicole Brimhall

    Brigham Young University

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering