Characterization and Design of Two-Axis Bi-Directional Microstages

ORAL

Abstract

Micro Electro Mechanical Systems (MEMS) are critical components of many cutting edge technologies. We are developing novel microstages for positioning and scanning applications. The microdevices are fabricated using Sandia National Laboratory's SUMMiT V MEMS foundry process. We present the tested performance of a two-axis, bi-directional stage system that is actuated using electrostatic forces. The stage has a maximum travel of $\sim$40 microns in both axes and is capable of simultaneous actuation in both X and Y directions. Other characterizations focus on stiction and friction forces within the device and operating the device at high frequencies. Based on the results of these tests, we have made some major design changes to increase the maximum travel of the stages. A new design for a long distance travel stage is also presented. This design provides two-axis, bi-directional motion with a maximum displacement of $\sim$1000 microns in both axes. Other design changes are also presented which will improve the overall functionality of the device.

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Authors

  • James Matthews

    Angelo State University Department of Physics

  • Tim Dallas

    Texas Tech Univeristy Department of Electrical Engineering, Texas Tech University Deptarment of Electrical Engineering

  • Shufang Su

    Iowa State University, Los Alamos National Laboratory, Lawrence Livermore National Laboratory, University of Arizona, Sandia National Laboratories, Physics Department, Texas Tech University, Lubbock, TX 79409-1051, Northwestern University, Texas Tech University, University of Utah Department of Physics, University of Toulouse-UPS, IRSAMC, Toulouse, France, University of Arizona, Department of Physics, National Institute of Advanced Industrial Science and Technology, Texas A\&M University, Midwest Proton Radiotherapy Institute, Birdville ISD, Universidad de Colima, Universidad de Buenos Aires, Brigham Young University, UT Atlington, MV Systems, Colorado State University, St. Petersburg Electrotechnical University, New Mexico State University, Texas State Univ., CAMD/LSU, Texas Christian University, Fort Worth, TX, North Side High School, Fort Worth, TX, Nitronex Corporation, Arizona State University, Angelo State University Department of Physics, Texas Tech University Deptarment of Electrical Engineering