Ferroelectric Hafnia-Zirconia: Enabling Nanomechanical Frequency Control on CMOS
ORAL · Invited
Abstract
The integration of nanoscale ferroelectric transducers into advanced semiconductor nodes enables the direct implementation of high-frequency nanomechanical resonators onto CMOS chips. The discovery of the metastable ferroelectric phase in hafnia-zirconia represents a pivotal advancement, introducing an integrated transducer that bridges nanoscale mechanics with semiconductor electronics. Hafnia-zirconia films, traditionally utilized in amorphous form as high-k dielectrics in standard semiconductor processes, can be engineered to stabilize in a ferroelectric phase with strong piezoelectric coupling.
Ferroelectric hafnia-zirconia transducers facilitate the development of on-chip nanomechanical resonators with quality factors several orders of magnitude higher than those of solid-state counterparts. This eceptional performance, combined with seamless CMOS integration, enables compact, high-performance solutions for on-chip clocks, local oscillators, and microwave, addressing the growing demands of frequency control in modern computing and communication systems.
In this talk, I will present recent advancements in the development of ferroelectric hafnia-zirconia transducers for nanomechanical resonators, oscillators, and filters. I will begin with an overview of the underlying physics and material engineering challenges associated with stabilizing the ferroelectric phase and enhancing piezoelectric coupling in hafnia-zirconia films. Additionally, I will introcue the unique opportunities provided by phase transitions in hafnia-zirconia for temperature compensaiton and frequency tuning, as well as the advantages of atomic-layer deposition in creating three-dimensional resonator architectures. Finally, I'll present latest achievements in realizing (1) temperature-insensitive hafnia-zirconia clocks and (2) massively arrayed ferroelectric-gate fin microwave filters, enabled by hafnia-zirconia films, and will discuss future research directions towards monolithic integration with CMOS.
Ferroelectric hafnia-zirconia transducers facilitate the development of on-chip nanomechanical resonators with quality factors several orders of magnitude higher than those of solid-state counterparts. This eceptional performance, combined with seamless CMOS integration, enables compact, high-performance solutions for on-chip clocks, local oscillators, and microwave, addressing the growing demands of frequency control in modern computing and communication systems.
In this talk, I will present recent advancements in the development of ferroelectric hafnia-zirconia transducers for nanomechanical resonators, oscillators, and filters. I will begin with an overview of the underlying physics and material engineering challenges associated with stabilizing the ferroelectric phase and enhancing piezoelectric coupling in hafnia-zirconia films. Additionally, I will introcue the unique opportunities provided by phase transitions in hafnia-zirconia for temperature compensaiton and frequency tuning, as well as the advantages of atomic-layer deposition in creating three-dimensional resonator architectures. Finally, I'll present latest achievements in realizing (1) temperature-insensitive hafnia-zirconia clocks and (2) massively arrayed ferroelectric-gate fin microwave filters, enabled by hafnia-zirconia films, and will discuss future research directions towards monolithic integration with CMOS.
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Presenters
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Roozbeh Tabrizian
University of Florida
Authors
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Roozbeh Tabrizian
University of Florida