Extending Energy-Dispersive X-ray Spectroscopy to Chemical Shift Detection
ORAL
Abstract
Energy-dispersive X-ray spectroscopy (EDS) is widely used in electron microscopes for elemental analysis. Previously, EDS had been limited to elemental mapping. However, information on an element’s chemical bonding, such as its oxidation state, for example, is often desired. The energy resolution of EDS is typically on the 100-eV level, which seems insufficient to resolve chemical shifts (typically a few eV). Here we apply curve fitting to high-quality energy EDS spectra, achieving spectroscopic precision of 0.1 eV. We demonstrate the detection of chemical shifts in aluminum and tungsten oxide. As modern detectors become more efficient, achieving high counts for chemical shift analysis within a reasonable acquisition time becomes more feasible.
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Publication: https://arxiv.org/abs/2409.15639
Presenters
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Matthew H Mecklenburg
University of California Los Angeles
Authors
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Matthew H Mecklenburg
University of California Los Angeles
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Yarin Heffes
University of California, Los Angeles
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Rebekah M Jin
University of California, Los Angeles
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Tristan P O'Neill
University of California, Los Angeles (UCLA), University of California, Los Angeles
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Jared J Lodico
University of California, Los Angeles
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Brian T Zutter
California State University, Los Angeles
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Brian Christopher Regan
University of California, Los Angeles
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Yueyun Chen
University of California, Los Angeles