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Machine learning workflows for optimization of plasma-based devices

POSTER

Abstract

In this study, we employed machine learning (ML) techniques to optimize operating parameters of plasma-based devices, including low-temperature plasma reactors used for microelectronics manufacturing as well as advanced laser-based accelerators. Our strategy utilized multi-fidelity training of unified surrogate models using simulation and experimental data. We leveraged available high-energy experimental data obtained from the BELLA iP2 beamline at LBNL to train our Gaussian Process (GP) models. By implementing Bayesian optimization and Gaussian processes using the PyTorch and BoTorch libraries, we efficiently explored parameter spaces. The results demonstrated that our ML-driven approach significantly enhances the predictive capabilities and optimization efficiency of plasma laser systems, providing valuable insights and improvements in plasma dynamics simulations.

Publication: [1] G.S. Oehrlein, S.M. Brandstadter, R.L. Bruce, J.P. Chang, J.C. DeMott, V.M. Donnelly, et al., Future of plasma etching for microelectronics: Challenges and opportunities, AIP Publishing. (2024). https://pubs.aip.org/avs/jvb/article/42/4/041501/3297248/Future-of plasma-etching for-microelectronics (accessed July 3, 2024).<br>[2] K.D. Humbird, R.G. McClarren, B.K. Spears, J.L. Peterson, Transfer learning to model Inertial confinement fusion experiments | ieee journals & magazine | ieee xplore, IEEE Xplore. (2019). https://ieeexplore.ieee.org/document/8932676/ (accessed July 2, 2024).<br>[3] https://pubs.aip.org/aip/pop/article/29/8/083102/2845062/Laser-solid-interaction-studies enabled-by-the-new<br>[4] https://arxiv.org/abs/2212.12551<br>[6] Short pulse laser based ion fast ignition for ife. National Ignition Facility and Photon Science.

Presenters

  • Andrea Diaz

    St. Mary's University

Authors

  • Andrea Diaz

    St. Mary's University

  • Ethan J Rodriguez

    St. Mary's University