Scanning microwave microscopy using a high-Q superconducting resonator

Current materials research in solid-state quantum devices is concerned with improving existing materials platforms by identifying the microscopic nature of coherence-limiting materials defects and investigating new materials for quantum information processing. Near-field scanning microwave microscopy (NSMM), which is both non-invasive and sensitive to materials properties at the microwave frequencies where many solid-state quantum devices operate, is a recently-developed tool that would be extremely useful for investigating such defects and candidate platforms. We present the design and implementation of a high-throughput NSMM based on a high-Q superconducting resonator. Our instrument improves upon previous implementations by simplifying the resonator probe with a lumped-element geometry patterned in a NbTiN thin film. We demonstrate the sensitivity of our probe by performing capacitive imaging with zepto-farad sensitivity down to single-photon power levels. We will conclude by discussing prospects for coherently coupling to quantum coherent devices and using dissipative imaging for resolving energy relaxation channels in such devices.