A 300 mm foundry silicon spin qubit unit cell exceeding 99 % fidelity in all operations

Fabrication of quantum processors in advanced 300 mm wafer-scale complementary metal–oxide–semiconductor (CMOS) foundries provides a unique scaling pathway towards commercially viable quantum computing with potentially millions of qubits on a single chip. We will present the latest on the precise qubit operation of a silicon two-qubit devices made in a 300 mm semiconductor processing line. The key metrics including single- and two qubit control fidelities exceed 99 % and state preparation and measurement fidelity exceeds 99.9 %, as evidenced by gate set tomography (GST). Next to the benchmarking we will discuss the fidelity limiting factors and outlook for foundry-made silicon spin qubits. Our results answer the longstanding question whether the favourable properties including high-fidelity operation and long coherence times can be preserved when transitioning from a tailored academic to an industrial semiconductor fabrication technology.