Enhanced mechanical reliability of defect-repaired and passivated 2D semiconductors
ORAL
Abstract
Two-dimensional (2D) transition metal dichalcogenides (TMDs) are semiconductors which exhibit a relatively high density of defects, mainly in the form of chalcogen vacancies1,2. This high density of defects hinders the long-term reliability of their mechanical and electronic characteristics3–5. Here, we utilize a quick and straightforward pretreatment process that repairs and passivates vacancy defect sites in 2D TMDs. We employ atomic force microscopy (AFM)-based nanomechanical experiments and Weibull statistics to demonstrate that repairing and passivating vacancies significantly improves the mechanical reliability, particularly static fatigue, of monolayer molybdenum disulfide (MoS2) and tungsten disulfide (WS2). In addition, ab initio molecular dynamics (AIMD) simulations, X-ray photoelectron spectroscopy (XPS), and atomic-scale imaging using conductive atomic force microscopy (C-AFM) provide deeper insights into the mechanisms involved in defect repair, passivation, and the fatigue response of these 2D semiconductors.
References
1. Liu, D., Guo, Y., Fang, L. & Robertson, J. Sulfur vacancies in monolayer MoS2 and its electrical contacts. Appl. Phys. Lett. 103, 183113 (2013).
2. Hong, J. et al. Exploring atomic defects in molybdenum disulphide monolayers. Nat. Commun. 6, 6293 (2015).
3. O’Brien, K. P. et al. Process integration and future outlook of 2D transistors. Nat. Commun. 14, 6400 (2023).
4. Cui, T. et al. Mechanical reliability of monolayer MoS2 and WSe2. Matter 5, 2975–2989 (2022).
5. Lanza, M., Smets, Q., Huyghebaert, C. & Li, L.-J. Yield, variability, reliability, and stability of two-dimensional materials based solid-state electronic devices. Nat. Commun. 11, 5689 (2020).
References
1. Liu, D., Guo, Y., Fang, L. & Robertson, J. Sulfur vacancies in monolayer MoS2 and its electrical contacts. Appl. Phys. Lett. 103, 183113 (2013).
2. Hong, J. et al. Exploring atomic defects in molybdenum disulphide monolayers. Nat. Commun. 6, 6293 (2015).
3. O’Brien, K. P. et al. Process integration and future outlook of 2D transistors. Nat. Commun. 14, 6400 (2023).
4. Cui, T. et al. Mechanical reliability of monolayer MoS2 and WSe2. Matter 5, 2975–2989 (2022).
5. Lanza, M., Smets, Q., Huyghebaert, C. & Li, L.-J. Yield, variability, reliability, and stability of two-dimensional materials based solid-state electronic devices. Nat. Commun. 11, 5689 (2020).
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Presenters
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Boran Kumral
University of Toronto
Authors
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Boran Kumral
University of Toronto
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Nima Barri
University of Toronto
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Pedro G Demingos
University of Toronto
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Gokay Adabasi
University of California, Merced
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Guorui Wang
University of Science and Technology of China
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Mehmet Baykara
University of California, Merced
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Chandra V Singh
University of Toronto
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Tobin Filleter
University of Toronto