Multi-qubit Gate Randomized Benchmarking in a Neutral Atom Quantum Processor

Arrays of neutral atoms are a promising architecture for the realization of utility-scale quantum information processing. High fidelity, entangling gate operations have been observed in a number of systems featuring divalent atoms, critical for efficient Quantum Error Correction. Randomized benchmarking protocols for multi-qubit gates are a very important tool for estimating the overall fidelity of gate operations with high precision. In practice, the requirement to have individual qubit addressing and deep circuits have made it difficult to fully and accurately measure high fidelity entangling operations in neutral atom arrays. We construct a universal gateset on ground-state, nuclear spin qubits with parallel, individually-controlled single qubit gates, coherent transfer of population to an optical clock qubit, and entangling operations via Rydberg blockade. We demonstrate two-qubit Clifford randomized benchmarking with high fidelity, individually-controlled single-qubit gates, and circuits with more than 200 CZ gates on a pair of atoms. These results are an important milestone in the characterization of high fidelity, entangling operations for universal quantum computing with neutral atom arrays.