Spectroscopy measurements of a plasma produced by a commercial etching system

Nya Lampkin; Peter Schauss; Peter Schauss; Peter Schauss; Peter Schauss; Peter Schauss; Peter Schauss

Spectroscopy measurements of a plasma produced by a commercial etching system

POSTER

Abstract

Plasma etching and cleaning is very common in the electronics fields. Since the 1970s, the use of etching has become standard in the development of substrates for microelectronics. Recently a number of commercial plasma etching systems have been introduced to the market. However, the systems are not commonly used in industry or in academia since there effectiveness has not be adequately verified in the literature. In this poster, we present spectroscopic measurements of the plasma produced by a commercial plasma etching system in an effort to start this verification process.

Authors

Nya Lampkin

Valdosta State University
Peter Schauss

University of Notre Dame, Los Alamos National Laboratory, North Carolina State University, University of Notre dame, Columbia University, Mississippi State Univ, University of Pennsylvania, Carnegie Mellon University, University of Puerto Rico at Humacao, JLAB, MIT, University of Alabama at Birmingham, Florida State University, NHMFL, University College Dublin, Department of Physics, Florida State University; National High Magnetic Field Laboratory, CNR-Instituto Nanoscienze, Karlsruhe Institute of Technology (KIT), Institute of Nanotechnology, Department of Chemistry, Florida State University, University of Alabama at Birmingham, Department of Physics, Birmingham, AL 35294-1170,USA, Department of Chemistry, Virginia Polytechnic Institute and State University, Francis Marion University, University of Richmond, Valdosta State University, University of Pittsburgh, Fermi National Lab, university of minnesota, Univ of Virginia, Joint Quantum Institute, University of Maryland, Georgetown University, IonQ Inc.
Peter Schauss

University of Notre Dame, Los Alamos National Laboratory, North Carolina State University, University of Notre dame, Columbia University, Mississippi State Univ, University of Pennsylvania, Carnegie Mellon University, University of Puerto Rico at Humacao, JLAB, MIT, University of Alabama at Birmingham, Florida State University, NHMFL, University College Dublin, Department of Physics, Florida State University; National High Magnetic Field Laboratory, CNR-Instituto Nanoscienze, Karlsruhe Institute of Technology (KIT), Institute of Nanotechnology, Department of Chemistry, Florida State University, University of Alabama at Birmingham, Department of Physics, Birmingham, AL 35294-1170,USA, Department of Chemistry, Virginia Polytechnic Institute and State University, Francis Marion University, University of Richmond, Valdosta State University, University of Pittsburgh, Fermi National Lab, university of minnesota, Univ of Virginia, Joint Quantum Institute, University of Maryland, Georgetown University, IonQ Inc.
Peter Schauss

University of Notre Dame, Los Alamos National Laboratory, North Carolina State University, University of Notre dame, Columbia University, Mississippi State Univ, University of Pennsylvania, Carnegie Mellon University, University of Puerto Rico at Humacao, JLAB, MIT, University of Alabama at Birmingham, Florida State University, NHMFL, University College Dublin, Department of Physics, Florida State University; National High Magnetic Field Laboratory, CNR-Instituto Nanoscienze, Karlsruhe Institute of Technology (KIT), Institute of Nanotechnology, Department of Chemistry, Florida State University, University of Alabama at Birmingham, Department of Physics, Birmingham, AL 35294-1170,USA, Department of Chemistry, Virginia Polytechnic Institute and State University, Francis Marion University, University of Richmond, Valdosta State University, University of Pittsburgh, Fermi National Lab, university of minnesota, Univ of Virginia, Joint Quantum Institute, University of Maryland, Georgetown University, IonQ Inc.
Peter Schauss

University of Notre Dame, Los Alamos National Laboratory, North Carolina State University, University of Notre dame, Columbia University, Mississippi State Univ, University of Pennsylvania, Carnegie Mellon University, University of Puerto Rico at Humacao, JLAB, MIT, University of Alabama at Birmingham, Florida State University, NHMFL, University College Dublin, Department of Physics, Florida State University; National High Magnetic Field Laboratory, CNR-Instituto Nanoscienze, Karlsruhe Institute of Technology (KIT), Institute of Nanotechnology, Department of Chemistry, Florida State University, University of Alabama at Birmingham, Department of Physics, Birmingham, AL 35294-1170,USA, Department of Chemistry, Virginia Polytechnic Institute and State University, Francis Marion University, University of Richmond, Valdosta State University, University of Pittsburgh, Fermi National Lab, university of minnesota, Univ of Virginia, Joint Quantum Institute, University of Maryland, Georgetown University, IonQ Inc.
Peter Schauss

University of Notre Dame, Los Alamos National Laboratory, North Carolina State University, University of Notre dame, Columbia University, Mississippi State Univ, University of Pennsylvania, Carnegie Mellon University, University of Puerto Rico at Humacao, JLAB, MIT, University of Alabama at Birmingham, Florida State University, NHMFL, University College Dublin, Department of Physics, Florida State University; National High Magnetic Field Laboratory, CNR-Instituto Nanoscienze, Karlsruhe Institute of Technology (KIT), Institute of Nanotechnology, Department of Chemistry, Florida State University, University of Alabama at Birmingham, Department of Physics, Birmingham, AL 35294-1170,USA, Department of Chemistry, Virginia Polytechnic Institute and State University, Francis Marion University, University of Richmond, Valdosta State University, University of Pittsburgh, Fermi National Lab, university of minnesota, Univ of Virginia, Joint Quantum Institute, University of Maryland, Georgetown University, IonQ Inc.
Peter Schauss

University of Notre Dame, Los Alamos National Laboratory, North Carolina State University, University of Notre dame, Columbia University, Mississippi State Univ, University of Pennsylvania, Carnegie Mellon University, University of Puerto Rico at Humacao, JLAB, MIT, University of Alabama at Birmingham, Florida State University, NHMFL, University College Dublin, Department of Physics, Florida State University; National High Magnetic Field Laboratory, CNR-Instituto Nanoscienze, Karlsruhe Institute of Technology (KIT), Institute of Nanotechnology, Department of Chemistry, Florida State University, University of Alabama at Birmingham, Department of Physics, Birmingham, AL 35294-1170,USA, Department of Chemistry, Virginia Polytechnic Institute and State University, Francis Marion University, University of Richmond, Valdosta State University, University of Pittsburgh, Fermi National Lab, university of minnesota, Univ of Virginia, Joint Quantum Institute, University of Maryland, Georgetown University, IonQ Inc.