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Exploring Unconventional Resistivity Scaling in Topological Semimetals for Interconnects Beyond Copper

ORAL

Abstract

Due to surface and disorder scattering, the polynomial increase in resistivity of conventional metals with shrinking dimensions severely impacts the performance of highly scaled integrated circuits. Here we explore a new class of materials – topological semimetals – as an alternative solution. We demonstrate that, through conduction of the topological surface states, the resistivity in topological semimetals reduces with decreasing feature size in the nanometer scale, even in the presence of defects and grain-boundary scattering. This sharply contrasts the scaling of conventional metals, such as Cu. In this talk, we will present first-principles calculation results of a representative Si-CMOS compatible topological semimetal CoSi, and report experimental evidence for surface-dominated transport in CoSi thin films, showing resistivity below that of the bulk single-crystals. Our proof-of-principle studies demonstrate the potential of topological semimetal interconnects. We will conclude with a set of the guidelines for screening topological semimetals for such applications.

Publication: 1. "Topological Semimetals for Scaled Back-End-Of-Line Interconnect Beyond Cu", 2020 IEEE International Electron Devices Meeting (IEDM).<br>2. "Size-Dependent Grain-Boundary Scattering in Topological Semimetals", Physical Review Applied 18 (3), 034053 (2022).<br>3. "Unconventional Resistivity Scaling in Topological Semimetal CoSi", arXiv:2209.06135 (2022)<br>

Presenters

  • Ching-Tzu Chen

    IBM TJ Watson Research Center

Authors

  • Ching-Tzu Chen

    IBM TJ Watson Research Center

  • Christian Lavoie

    IBM TJ Watson Research Center

  • Nicholas A Lanzillo

    IBM Research, IBM Research, 257 Fuller Road, Albany, NY 12203, USA

  • Utkarsh Bajpai

    IBM Research, IBM Research, 257 Fuller Road, Albany, NY 12203, USA

  • Oki Gunawan

    IBM TJ Watson Research Center

  • Asir Intisar Khan

    Stanford University, Stanford University, USA

  • Guy Cohen

    IBM TJ Watson Research Center

  • Teodor Todorov

    IBM TJ Watson Research Center

  • John Bruley

    IBM Research

  • Vesna Stanic

    IBM Research, Brookhaven National Laboratory

  • Hsin Lin

    Academia Sinica

  • Ion Garate

    Universite de Sherbrooke

  • Shang-Wei Lien

    National Cheng Kung University, Department of Physics, National Cheng Kung University, Tainan 701, Taiwan

  • Yi-Hsin Tu

    National Cheng Kung University, Department of Physics, National Cheng Kung University, Tainan 701, Taiwan

  • Gengchiau Liang

    National University of Singapore, Department of Electrical and Computer Engineering, College of Design and Engineering, National University of Singapore, Singapore

  • Cheng-Yi Huang

    Northeastern University

  • Arun Bansil

    Northeastern University, Northeastern University, Boston, USA

  • Sushant Kumar

    Rensselaer Polytechnic Institute

  • Ravishankar Sundararaman

    Rensselaer Polytechnic Institute

  • Jean Jordan-Sweet

    IBM Research

  • Peter Kerns

    IBM Research

  • Nathan Marchack

    IBM TJ Watson Research Center

  • Tay-Rong Chang

    Natl Cheng Kung Univ, National Cheng Kung University