Scanning NV Magnetometry for Magnetic Memory Devices
ORAL
Abstract
Scanning NV magnetometry (SNVM) is an emerging quantum sensing technique which allows to measure minute magnetic fields with nanoscale resolution. We present a specific use-case of SNVM: the characterization of magnetic nanowires. Magnetic nanowires are among the essential building-blocks of contemporary spintronic devices [1] since their magnetic properties can be tuned by their geometry, and their fabrication is compatible with standard semiconductor fabrication schemes. While their topography and homogeneity can be well characterized with established techniques, it remains difficult to access their microscopic magnetic properties which are key to improve device performance.
Here, we demonstrate magnetic imaging of ultra-scaled magnetic nanowires by SNVM [2]. The imaging reveals the presence of weak magnetic inhomogeneities inside in-plane magnetized nanowires that are largely undetectable with standard metrology. In this context, we will discuss the potential of SNVM for semiconductor device analysis.
[1] Parkin, S., & Yang, S. H. (2015). Memory on the racetrack. Nature Nanotechnology, 10(3), 195–198.
[2] Celano U., et al., submitted
Here, we demonstrate magnetic imaging of ultra-scaled magnetic nanowires by SNVM [2]. The imaging reveals the presence of weak magnetic inhomogeneities inside in-plane magnetized nanowires that are largely undetectable with standard metrology. In this context, we will discuss the potential of SNVM for semiconductor device analysis.
[1] Parkin, S., & Yang, S. H. (2015). Memory on the racetrack. Nature Nanotechnology, 10(3), 195–198.
[2] Celano U., et al., submitted
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Presenters
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Peter Rickhaus
Qnami, ETH, Zurich
Authors
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Peter Rickhaus
Qnami, ETH, Zurich
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Umberto Celano
IMEC
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Hai Zhong
Qnami
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Florin Ciubotaru
IMEC
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Laurentiu Stoleriu
Alexandru Ioan Cuza University
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Alexander Stark
Qnami
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Felipe Favaro de Oliveira
Qnami
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Mathieu Munsch
Qnami AG
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Paola Favia
IMEC
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Maxim Korytov
IMEC
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Patricia van Marcke
IMEC
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Patrick Maletinsky
Qnami
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Christoph Adelmann
IMEC
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Paul van der Heide
IMEC