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Scanning NV Magnetometry for Magnetic Memory Devices

ORAL

Abstract

Scanning NV magnetometry (SNVM) is an emerging quantum sensing technique which allows to measure minute magnetic fields with nanoscale resolution. We present a specific use-case of SNVM: the characterization of magnetic nanowires. Magnetic nanowires are among the essential building-blocks of contemporary spintronic devices [1] since their magnetic properties can be tuned by their geometry, and their fabrication is compatible with standard semiconductor fabrication schemes. While their topography and homogeneity can be well characterized with established techniques, it remains difficult to access their microscopic magnetic properties which are key to improve device performance.

Here, we demonstrate magnetic imaging of ultra-scaled magnetic nanowires by SNVM [2]. The imaging reveals the presence of weak magnetic inhomogeneities inside in-plane magnetized nanowires that are largely undetectable with standard metrology. In this context, we will discuss the potential of SNVM for semiconductor device analysis.

[1] Parkin, S., & Yang, S. H. (2015). Memory on the racetrack. Nature Nanotechnology, 10(3), 195–198.

[2] Celano U., et al., submitted

Presenters

  • Peter Rickhaus

    Qnami, ETH, Zurich

Authors

  • Peter Rickhaus

    Qnami, ETH, Zurich

  • Umberto Celano

    IMEC

  • Hai Zhong

    Qnami

  • Florin Ciubotaru

    IMEC

  • Laurentiu Stoleriu

    Alexandru Ioan Cuza University

  • Alexander Stark

    Qnami

  • Felipe Favaro de Oliveira

    Qnami

  • Mathieu Munsch

    Qnami AG

  • Paola Favia

    IMEC

  • Maxim Korytov

    IMEC

  • Patricia van Marcke

    IMEC

  • Patrick Maletinsky

    Qnami

  • Christoph Adelmann

    IMEC

  • Paul van der Heide

    IMEC