Hybrid academic/industrial silicon spin qubit devices for spin readout and manipulation

Silicon based spin qubits are among the leading candidates for a scalable quantum computer. To unveil their full potential regarding scalability and co-integration with classical electronics, these devices have to be fabricated in a Complementary-Metal-Oxide-Semiconductor (CMOS) process.

Even though qubits made with industrial CMOS processes have made impressive progress recently, the development cycles of a CMOS based qubit device remain long and the fabrication is restricted to a limited set of materials and processes. Hybrid qubit devices combining the advantages of CMOS fabrication and academic clean room fabrication can bridge this gap.

In this presentation we show the fabrication of hybrid qubit devices made with an industrial CMOS process and post-processed in an academic clean room. This approach allows us to integrate micro-magnets or superconducting resonators and strip lines in close proximity to the qubit devices.

Furthermore, we will characterize the spin physics of these hybrid devices, exploring different approaches for spin readout and manipulation.