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Microstructural analysis and electro-optic properties of thick epitaxial BaTiO<sub>3</sub> films integrated on silicon (001)

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Abstract

Integrating ferroelectric materials onto Si is a critical part of the design new photonic devices such as optical modulators and switches. One property used to make optical modulators is the electro-optic effect. Most work in electro-optic modulators is directly related to analyzing the devices themselves, whereas less work has been doing on investigating the properties of the thin films. Here, we analyze thick BTO films integrated on Si via multiple experimental techniques and compare with modelling to study their crystalline properties as a function of thickness. We use this to more carefully analyze electro-optic measurements of BTO on Si. This work can be used to compliment and improve the BTO integrated electro-optic device making process.

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Presenters

  • Marc S Reynaud

    Department of Physics, University of Texas at Austin

Authors

  • Marc S Reynaud

    Department of Physics, University of Texas at Austin

  • Hyoju Park

    Walker Department of Mechanical Engineering, University of Texas at Austin, University of Texas at Austin

  • Zuoming Dong

    The University of Texas at Austin, Department of Electrical and Computer Engineering, University of Texas at Austin

  • Wente Li

    Department of Physics University of Texas at Austin, University of Texas at Austin

  • Agham Posadas

    Department of Physics, University of Texas at Austin, University of Texas at Austin

  • Dan Wasserman

    The University of Texas at Austin, Department of Electrical and Computer Engineering, University of Texas at Austin

  • Jamie Warner

    Walker Department of Mechanical Engineering, University of Texas at Austin, University of Texas at Austin

  • Alexander A Demkov

    University of Texas at Austin, Department of Physics, University of Texas at Austin