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Nanoscale control of LaAlO<sub>3</sub>/SrTiO<sub>3</sub> metal-insulator transition using ultra-low-voltage electron-beam lithography

ORAL

Abstract

We describe a method to control the insulator-metal transition at the LaAlO3/SrTiO3 interface using ultra-low-voltage electron beam lithography (ULV-EBL). Compared with previous reports that utilize conductive atomic-force-microscope lithography (c-AFM), this approach can provide comparable resolution (~10 nm) at write speeds (10 mm/s) that are up to 10,000x faster than c-AFM. The writing technique is non-destructive and the conductive state is reversible via prolonged exposure to air. Transport properties of representative devices are measured at milli-Kelvin temperatures, where superconducting behavior is observed. We also demonstrate the ability to create conducting devices on graphene/LaAlO3/SrTiO3 and hBN/graphene/LaAlO3/SrTiO3 heterostructures. The underlying mechanism is believed to be closely related to the same mechanism regulating c-AFM-based methods.

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Presenters

  • Dengyu Yang

    Physics and Astronomy, University of Pittsburgh, University of Pittsburgh

Authors

  • Dengyu Yang

    Physics and Astronomy, University of Pittsburgh, University of Pittsburgh

  • Shan Hao

    Physics and Astronomy, University of Pittsburgh, Department of Physics & Astronomy, University of Pittsburgh, University of Pittsburgh

  • Jun Chen

    Electrical and Computer Engineering, University of Pittsburgh

  • Qing Guo

    Physics and Astronomy, University of Pittsburgh

  • Muqing Yu

    Physics and Astronomy, University of Pittsburgh, University of Pittsburgh

  • Yang Hu

    Physics and Astronomy, University of Pittsburgh, University of Pittsburgh

  • Kitae Eom

    Materials Science and Engineering, University of Wisconsin-Madison, Department of Materials Science and Engineering, University of Wisconsin-Maddison, Department of Materials Science and Engineering, University of Wisconsin, Department of Materials Science Engineering, University of Wisconsin-Madison, Department of Materials Science and Engineering, University of Wisconsin-Madison,, University of Wisconsin, Material Science and Engineering, University of Wisconsin-Madison, University of Wisconsin-Madison, University of Wisconsin-Maddison

  • Jungwoo Lee

    Materials Science and Engineering, University of Wisconsin-Madison, University of Wisconsin, Madison, Department of Materials Science and Engineering, University of Wisconsin-Madison,, University of Wisconsin, University of Wisconsin-Madison, University of Wisconsin-Maddison, Department of Materials Science and Engineering, University of Wisconsin-Madison

  • Chang-Beom Eom

    Materials Science and Engineering, University of Wisconsin-Madison, University of Wisconsin, Madison, Department of Materials Science and Engineering, University of Wisconsin-Maddison, Department of Materials Science and Engineering, University of Wisconsin, Department of Materials Science Engineering, University of Wisconsin-Madison, Department of Materials Science and Engineering, University of Wisconsin-Madison,, University of Wisconsin, Material Science and Engineering, University of Wisconsin-Madison, University of Wisconsin-Madison, University of Wisconsin-Maddison, University of Wisconsin - Madison, University of Wisconsin Madison, Department of Materials Science and Engineering, University of Wisconsin-Madison

  • Patrick R Irvin

    Physics and Astronomy, University of Pittsburgh, University of Pittsburgh, Department of Physics and Astronomy, University of Pittsburgh, Department of Physics & Astronomy, University of Pittsburgh

  • Jeremy Levy

    Physics and Astronomy, University of Pittsburgh, University of Pittsburgh, Department of Physics and Astronomy, University of Pittsburgh, Department of Physics & Astronomy, University of Pittsburgh