Spin-Orbit Coupled 2-Dimensional Electron Gases in SrTaO₃ Heterostructures

2-Dimensional electron gases (2DEGs) with high mobility at room temperature and low defect concentrations are highly sought after for future advancements in high speed electronics. According to theoretical modeling, in a SrTaO₃/SrZrO₃/SrTiO₃ heterostructure, SrTaO₃ (STaO) will substantially electron dope SrTiO₃ (STO) through modulation doping, making it a prime candidate for a complex oxide 2DEG. STaO is also predicted to be metallic and possess strong spin orbit coupling, which should allow for a high mobility spin-orbit coupled 2DEG. Epitaxial films of STaO were grown on STO using hybrid molecular beam epitaxy, where Ta was introduced through a metal organic precursor and growth was monitored via reflected high energy electron diffraction. Stoichiometry and surface termination were determined by in situ x-ray photoelectron spectroscopy and Rutherford back scattering. Temperature dependent transport measurements and atomic force microscopy were used to determine electronic properties and surface topology, respectively.