APS Logo

Towards the packed nanocylinders with square arrays using block copolymers

POSTER

Abstract

The bottom-up approach using self-assembling molecules for the fabrication of nanopatterned layers in semiconductor manufacturing processes has been of great interest both from relevant industries and academia. Among various materials and subsequent nanopatterns, the packed nanocylinders with square arrays is the most desirable one. It is well known that the hexagonally packed array is by far the strongest due to the packing effects. Using the self-consistent field theory and also theoretical crystallography, we search for the possible route towards the nanocylinders with square packing from just common diblock copolymer systems and how to overcome the hexagonal arrays.

Presenters

  • Mingge Zhao

    Dankook University

Authors

  • Mingge Zhao

    Dankook University

  • Xiang Li

    Dankook University

  • Junhan Cho

    Dankook University