ALD and Plasma Tools for Better Quantum Devices

Next-generation quantum computers require better materials and processes to reduce losses associated with substrate-metal, metal-vacuum, and substrate-vacuum interfaces in superconducting systems, as well as losses due to roughness in diamond and photonic systems. Low-loss superconducting nitrides deposited by PE-ALD with in-situ surface preparation offer improved performance for resonators and qubits, while high quality etches achieve low roughness and reduce losses at substrate-vacuum interfaces. We will also discuss the importance of these techniques for low roughness diamond and photonic etches, superconducting 3D integration, and Superconducting Nanowire Single Photon Detectors.