GaAs to Si Nano-Bonding at T<220°C - Optimizing Nano-Contacting and Surface Energy Engineering for Interphase Formation
POSTER
Abstract
This work uses instead low temperature Nano-BondingTM, 1 (NB), via Surface Energy Engineering (SEE), to create 2D Precursor Phases leading to a high density of molecular cross-bonds and interphase formation. SEE is based on surface energy (SE) characterization via Three Liquid Contact Angle Analysis (3LCAA), and on composition by Ion Beam Analysis (IBA), and X-Ray Photoelectron Spectroscopy (XPS).
IBA yields absolute O coverages while XPS measures the distribution of oxidation states.
After Nano-Bonding, Surface Acoustic Wave Microscopy (SAM) and Cross-Sectional Transmission Electron Microscopy (TEM) image the bonded interface. SAM reveals that 98±1% of GaAs successfully nano-bonds to Si at T<220°C with compression and 48±1% bonds without compression.
TEM further reveals that both GaAs and Si are so reactive after SEE, that they oxidize very significantly without pressure applied in gaps found in the 48±1% bonded interphase.
1 Herbots et al. US Pat. 6613677 (2003), 7,851,365 (2010), 9,018,077 (2015), 9,589,801 (2017), pend. (2020)
Presenters
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Siddarth Jandhyala
Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University
Authors
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Siddarth Jandhyala
Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University
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Aashi R Gurijala
Physics, Arizona State University, Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University, Physics and Eyring Materials Center, Arizona State University
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Pranav Penmatcha
Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University
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Nikhil Suresh
Physics, Arizona State University, Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University, Physics and Eyring Materials Center, Arizona State University
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Amber A Chow
Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University
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Shaurya Khanna
Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University
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Wesley Peng
Physics, Arizona State University, Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University, Physics and Eyring Materials Center, Arizona State University
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Thilina Balasooriya
Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University, Physics and Eyring Materials Center, Arizona State University
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Mohammed Sahal
Physics, Arizona State University, SiO2 Innovates LLC, Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University, SiO2 Innovates, LLC
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Sukesh Ram
Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University
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Robert J Culbertson
Physics, Arizona State University, Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University, Physics and Eyring Materials Center, Arizona State University
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Nicole Herbots
Physics, Arizona State University, Dpt of Physics/Eyring Materials Center, Arizona State University, Physics Dpt/Eyring Materials Cr, Arizona State University, Physics and Eyring Materials Center, Arizona State University