Wide survey of Ta<sub>2</sub>O<sub>5</sub>-based mixed oxide coatings for gravitational wave detectors
ORAL
Abstract
Towards the goal of identifying other potential dopants that can further decrease the thermal noise, we carried out an extensive study of Ta2O5 doped with different oxides: Al2O3, HfO2, Nb2O5, Sc2O3, SiO2, TiO2, Y2O3, ZnO, and ZrO2. Films were grown by reactive sputtering with a 20% dopant cation concentration. The influence of the dopant on the structure, optical properties, crystallization temperature and mechanical loss was evaluated. We found that oxides with the lowest Gibbs free energy of formation, such as Sc2O3, inhibit the complete oxidation of the Ta2O5 phase. We identify dopants for which the material crystallizes as a ternary compound, such as TiO2 and ZnO, which can induce atomic mixing and reduce mechanical loss.
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Presenters
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Mariana Fazio
Colorado State University, Department of Electrical and Computer Engineering, Colorado State University, Department of Electrical and Computer Engineering, Colorado State University Fort Collins
Authors
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Mariana Fazio
Colorado State University, Department of Electrical and Computer Engineering, Colorado State University, Department of Electrical and Computer Engineering, Colorado State University Fort Collins
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Le Yang
Colorado State University, Department of Chemistry, Colorado State University, Department of Chemistry, Colorado State University Fort Collins
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Gabriele Vajente
California Institute of Technology, LIGO Laboratory, California Institute of Technology, Caltech
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Alena Ananyeva
California Institute of Technology, LIGO Laboratory, California Institute of Technology, Caltech
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GariLynn Billingsley
California Institute of Technology, LIGO Laboratory, California Institute of Technology, Caltech
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Ashot Markosyan
Stanford University, Department of Applied Physics, Ginzton Laboratory, Stanford University, Edward L. Ginzton Laboratory, Stanford University
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Riccardo Bassiri
E. L. Ginzton Laboratory, Stanford University, Stanford University, Department of Applied Physics, Ginzton Laboratory, Stanford University, Edward L. Ginzton Laboratory, Stanford University, E.L. Ginzton Laboratory, Stanford University
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Martin M. Fejer
E. L. Ginzton Laboratory, Stanford University, Stanford University, Department of Applied Physics, Ginzton Laboratory, Stanford University, Edward L. Ginzton Laboratory, Stanford University, E.L. Ginzton Laboratory, Stanford University
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Carmen Susana Menoni
Colorado State University, Department of Electrical and Computer Engineering, Department of Chemistry, Colorado State University, Department of Electrical and Computer Engineering, Colorado State University Fort Collins