Superconducting qubit devices: fabrication suite

Scalable quantum computing architecture and fabrication processes have been a hot research topic in the past decade. We focus on the realization of a quantum computer based on superconducting qubits with a fast qubit reset and initialization techniques, utilizing a quantum-circuit refrigerator [1]. We present the fabricated devices and results achieved to date, which includes resonators with high quality factors, > 1e6, long qubit lifetime > 0.02 ms and 3D integration techniques such as airbridges.