Ultra-thin film nanophotonics device on various optics application

The vast majority of optical metamaterial are fabricated on rigid substrates. Ultra-thin thickness and resulting mechanical flexibility in nanophotonics is the key attribute of various optics device including flexible imaging/display arrays, wearable photonics device, spectrometer, mechanics drive holography, multi-layer stacking Photonic device. Our fabrication techniques majorly depend on stamp transfer of dielectric material or direct patterning on flexible substrate. The significant difference is that fabricated device on past researches is all on thick polymer substrate. When direct bond such kind of flexible chip to any other devices, the thick substrate will damage the optical properties because of the scattering and reflection. Our flexible substrate is 200nm - 3 um PMMA, the thickness of which can be precisely controlled. The subwavelength thickness of this PMMA film will primarily reduce scattering and reflection optical reflection, which it will also protect the device surface. Furthermore, the ultra-thin PMMA layer is easy to remove after sticking the metasurface + PMMA to devices by special removing tape. Our ultra-thin PMMA substrate flexible device enables direct integration of optical metasurface to various optical devices like another metasuraface.