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Microwave-frequency acoustic resonators with high quality factors

ORAL

Abstract

We are pursuing the development of microwave-frequency acoustic resonators that can be integrated with superconducting circuits. By combining the mechanical properties of single crystal silicon with the mechanical isolation provided by phononic crystals, high quality factors at GHz frequencies should become achievable. In this talk, we describe the design and fabrication of mechanical resonators comprising suspended hybrid structures combining aluminum nitride and silicon supported by a phononic crystal, providing mechanical isolation with an integrated piezoelectric transduction mechanism. Measurements at low temperatures indicate this type of mechanical device can achieve quality factors approaching those of coplanar waveguide resonators, providing interesting potential for use in quantum information applications.

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Presenters

  • Ming-Han Chou

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

Authors

  • Ming-Han Chou

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

  • Etienne Dumur

    Argonne National Laboratory; University of Chicago, Neel Institute, University Grenoble Alpes, CNRS, Argonne National Laboratory, University of Chicago; Argonne National Laboratory, Institute for Molecular Engineering, University of Chicago, Chicago IL 60637,USA

  • Gregory Peairs

    University of California, Santa Barbara; University of Chicago, Department of Physics, University of California, Santa Barbara

  • Audrey Bienfait

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

  • Hung-Shen Chang

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

  • Christopher R Conner

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

  • Joel Grebel

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

  • Rhys G Povey

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

  • Kevin Satzinger

    University of California, Santa Barbara; University of Chicago(present in Google Inc), Google LLC, Google AI Quantum, Google Inc - Santa Barbara, University of California, Santa Barbara; University of Chicago

  • Youpeng Zhong

    University of Chicago, Pritzker School of Molecular Engineering, University of Chicago

  • Andrew Cleland

    University of Chicago, Argonne National Laboratory; University of Chicago, Pritzker School of Molecular Engineering, University of Chicago, Argonne National Laboratory, University of Chicago; Argonne National Laboratory