Scaling-up atomically thin coplanar semiconductor-metal circuirty via phase engineered chemical assembly

Phase engineered growth of 2H-MoTe₂ was understood by a solid-to-solid phase transformation mechanism, enabling the controlled growth of chip-size single-crystalline 2H-MoTe₂. Based on that, we report on the large-scale, spatially controlled chemical assembly of the integrated 2H MoTe₂ field-effect transistors with coplanar metallic 1T′ MoTe₂ contacts via phase engineered approaches.