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Unusual Phase Behavior by Blending Star-Shaped Block Copolymer and Linear Block Copolymer

POSTER

Abstract

Generally the block copolymer shows the arrangement of hexagonal patterns cylinder when volume fraction of one block is larger than that of the other. However, since all processes in the semiconductor business are geared to the rectilinear structure, it is needed to rework with time and money to apply block copolymer to the semiconductor business. Therefore, creating different structure from that of general block copolymer like square array structure or asymmetric lamellae has great significance in lithography applications.
Here, we synthesized star-shaped poly polystyrene-block-poly(4-thydroxystyrene) (PS-b-PHS) and linear polystyrene-block-poly(2-vinyl pyridine) (PS-b-P2VP) and blended them in various proportions to observe the structures. Because the molecular weight of the PS on the core of star polymer is much smaller than that of the PS in linear polymer, the spacing between cylinders is limited and the large configurational entropy is formed, which leads block copolymer to have different structure.

Presenters

  • Yeseong Seo

    Department of Chemical Engineering, Pohang Univ of Sci & Tech

Authors

  • Yeseong Seo

    Department of Chemical Engineering, Pohang Univ of Sci & Tech

  • Seonghyeon Ahn

    Department of Chemical Engineering, Pohang Univ of Sci & Tech

  • So Yeong Park

    Department of Chemical Engineering, Pohang Univ of Sci & Tech

  • Jaeyong Lee

    Department of Chemical Engineering, Pohang Univ of Sci & Tech

  • Wei-hua Li

    Department of Macromolecular Science, State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Macromolecular Science, Fudan Univ, Department of Macromolecular Science, Fudan University, State Key Laboratory of Molecular Engineering of Polymers, Department of Macromolecular Science, Fudan Univ, Shanghai, China, Department of Macromolecular Science, Fudan University, Shanghai, China, Department of Macromolecular Science, State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai, China.

  • JinKon Kim

    Department of Chemical Engineering, Pohang Univ of Sci & Tech