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Spatially-Resolved Layer, Interface and Dopant Profiling Using Tabletop Coherent EUV Beams

ORAL

Abstract

Next-generation devices, nanomaterials, quantum and magnetic materials necessarily have increasingly complex layers, dopants and 3D structures. As a result, non-destructive techniques that can image through visibly opaque layers with sensitivity to layer and interfacial composition are critical for synthesizing and optimizing these systems. We present a tabletop complex-imaging reflectometer illuminated by coherent high harmonic extreme ultraviolet (EUV) beams. Unlike most reflectometers that transversely average quantities such as film thicknesses over the sample, our reflectometer can attain diffraction-limited spatial resolution with high sensitivity to material composition by using coherent diffractive imaging (CDI). Our complex imaging reflectometer uses grazing-incidence CDI to generate high-resolution, high-fidelity phase and amplitude images of a sample at many incidence angles. The phase images are extremely sensitive to composition, allowing us to extract a 3D map of the sample. We demonstrate the ability to very sensitively probe diffusion at buried interfaces, layer thickness and dopant profiles in a non-destructive and spatially resolved manner, distinguishing our technique from others such as SIMS, Auger sputtering, or electron imaging.

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Presenters

  • Yuka Esashi

    University of Colorado, Boulder

Authors

  • Yuka Esashi

    University of Colorado, Boulder

  • Michael Tanksalvala

    University of Colorado, Boulder

  • Christina L. Porter

    University of Colorado, Boulder

  • Bin Wang

    University of Colorado, Boulder

  • Nicholas W. Jenkins

    University of Colorado, Boulder

  • Zhe Zhang

    University of Colorado, Boulder

  • Matthew N. Jacobs

    University of Colorado, Boulder

  • Galen P. Miley

    Northwestern University

  • Naoto Horiguchi

    imec

  • Jihan Zhou

    University of California, Los Angeles

  • Robert M Karl

    JILA, University of Colorado Boulder, JILA, University of Colorado, Boulder

  • Charles Bevis

    JILA, University of Colorado Boulder, University of Colorado, Boulder, JILA, University of Colorado, Boulder

  • Peter Johnsen

    JILA, University of Colorado Boulder, Department of Physics and JILA, University of Colorado, Boulder, University of Colorado, Boulder

  • Joshua Knobloch

    STROBE and JILA, University of Colorado, Boulder, STROBE and JILA, University of Colorado and NIST, University of Colorado, Boulder

  • Seth L. Cousin

    KMLabs

  • Emma Cating

    University of Colorado, Boulder

  • Michaël Hemmer

    University of Colorado, Boulder

  • Chen-Ting Liao

    JILA, University of Colorado Boulder, Physics, JILA/University of Colorado Boulder, University of Colorado, Boulder, JILA, University of Colorado, Boulder

  • Michael Gerrity

    Physics and JILA, CU Boulder, University of Colorado, Boulder

  • Henry Kapteyn

    JILA, University of Colorado Boulder, Department of Physics and JILA, University of Colorado, Boulder, STROBE and JILA, University of Colorado, Boulder, JILA and Department of Physics, University of Colorado, Boulder, STROBE and JILA, University of Colorado and NIST, Physics, JILA/University of Colorado Boulder, JILA, University of Colorado, Boulder, Physics and JILA, CU Boulder, JILA, University of Colorado, Boulder

  • Margaret Murnane

    JILA, University of Colorado Boulder, Department of Physics and JILA, University of Colorado, Boulder, STROBE and JILA, University of Colorado, Boulder, STROBE and JILA, University of Colorado and NIST, JILA, University of Colorado, Boulder, Physics and JILA, CU Boulder, University of Colorado, JILA, University of Colorado, Boulder