Low-Pressure Plasma Device for Activation Bonding Polydimethylsiloxane(PDMS) to Glass

Surface activation of PDMS through plasma treatment is a common technique used in the fabrication of microfluidic chips for a strong bond between PDMS and glass. Plasma treatment can be done in an open lab or low-pressure environment, in which commonly produces more activated stronger bonds. The activation levels of plasma treatment of PDMS and glass can be measured using atomic force microscopy. A low-pressure plasma bonder is being built and tested in order to produce stronger microfluidic devices. The configuration and experimentation of the self-built low-pressure plasma generator will be presented.