Self-consistent field theory for directed self-assembly in non-cylindrical confinement
ORAL
Abstract
We use self-consistent field theory to study the directed self-assembly (DSA) of diblock copolymers under non-cylindrical pore confinement such as oval, rectangular or the like. Our goal is to understand whether block copolymers can rectify non-cylindrical holes with reduced critical dimension in both minor direction and major direction of the non-cylindrical prepatterns. We explore a wide range of prepattern shapes, polymer characteristics to optimize DSA non-cylindrical holes. We also discover defects of DSA morphologies in the non-cylindrical prepattterns.
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Authors
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Tatsuhiro Iwama
Asahi Kasei E-Materials Co., University of California Santa Barbara
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Nabil Laachi
University of California Santa Barbara
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Bongkeun Kim
University of California Santa Barbara
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Kris Delaney
University of California Santa Barbara, UC Santa Barbara
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Glenn H. Fredrickson
University of California, Santa Barbara, University of California Santa Barbara, UC Santa Barbara