Fabricating Micro-Optomechanical Resonators Using High-Stress Si$_{3}$N$_{4}$

Optomechanical systems have been highly researched as a platform for testing macroscopic quantum effects and quantum decoherence. However, the required optical and mechanical properties are difficult to achieve. Increasing the tensile stress of a device is known to correlate with higher mechanical frequency and quality factor. We discuss fabrication of monolithic optomechanical devices using dielectric mirrors and high-stress stoichiometric Si$_{3}$N$_{4}$. We also present preliminary data on their mechanical and optical properties.