Polymerization of nanopores for controlled surface charges

The solid-state nanopores have emerged as a novel candidate for DNA sequencing and protein analysis. Traditional approaches for nanopore diameter shrinking use electron microscopy induced shrinking and deposition processes. These approaches are limited due to less control on surface composition of the deposited film, slow deposition rate and initial membrane thickness dependant shrinking processes. We report a novel approach of pulsed plasma polymer deposition which addresses all of the above described issues. The surface chemical composition and geometry of solid-state nanopores are controlled by plasma deposition of highly conformal thin polymeric films. Surface energy and pore-wall surface charges are controlled using appropriate monomer during plasma deposition process.