Testing of qubit materials and fabrication using superconducting resonators

We will present the results of measurements made on superconducting resonators fabricated using different substrates and superconducting metals. Specifically, the quality factor of these resonators will be shown to be closely related to not only the purity of the substrates and metals used in the process but also to the details of the fabrication. We will demonstrate the change in quality factor of a bare resonator when subjected to the qubit process. Based on our measurements we propose that superconducting resonators may form a test bed for troubleshooting the fabrication process for minimizing the materials related dissipation in the qubits.