Wide-angle incidence x-ray waveguides prepared by micro-/nano-technology using crystal surface diffraction

Grazing incidence x-ray waveguides have been most studied because of its simple geometry and its applicability for all photon energies. However, wide-angle incidence waveguides are also essential for modern x-ray optics, as far as coupling/guiding x-ray beams into given directions are concerned. To investigate this possibility we have prepared waveguides on silicon wafers by x-ray lithographic technique. The waveguides are 100$\mu $m high and 1cm long with different widths and the distance between the adjacent waveguides is 2.5 mm. Both the top and bottom surface of a waveguide are plated with gold. With this type of waveguides we have actually observed the effects of guiding x-rays in both lateral and vertical directions using (113) surface diffraction in Au/Si waveguide systems.